Microstructure and photoluminescence performances of sic nanocrystals embedded in sio2 matrix by magnetron co-sputtering
文献类型：期刊论文
| 作者 | Shi, LW; Li, YG; Wang, Q; Xue, CS; Zhuang, HZ |
| 刊名 | Rare metal materials and engineering
 |
| 出版日期 | 2005-07-01 |
| 卷号 | 34期号:7页码:1073-1076 |
| 关键词 | Magnetron co-sputtering Sic nanocrystals Microstructure Photoluminescence |
| ISSN号 | 1002-185X |
| 通讯作者 | Shi, lw(slwei521@tom.com) |
| 英文摘要 | Silicon carbide (sic) nanocrystals embedded in silicon oxide (sio2) matrix on si(111) substrates were prepared by radio frequency (rf) magnetron co-sputtering using a sio2/sic composite target and adopting subsequent high temperature annealing. the microstructure and luminescent performances of the films were determined by x-ray diffraction (xrd), fourier transform infrared transmission spectroscopy (ftir), scanning electron microscopy (sem) and photoluminescence (pl) measurements. the results show that the crystallization has taken place in the composite films after high temperature annealing and a part of amorphous sic has been changed into beta-sic nanocrystals, which are embedded in sio2 matrix. strong ultraviolet band (365 nm) and blue bands (458 nm and 490 nm) pl from the films, which is excited by 280 nm light, have been observed at room temperature. pl intensity increases with increasing of annealing temperature. pl is attributed to the luminescent centers formed by the si-o related defects in the film. |
| WOS关键词 | MECHANISM ; SILICON ; FILMS ; BLUE |
| WOS研究方向 | Materials Science ; Metallurgy & Metallurgical Engineering |
| WOS类目 | Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering |
| 语种 | 英语 |
| WOS记录号 | WOS:000231868200018 |
| 出版者 | NORTHWEST INST NONFERROUS METAL RESEARCH |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2426346 |
| 专题 | 半导体研究所 |
| 通讯作者 | Shi, LW |
| 作者单位 | Shandong Normal Univ, Coll Phys & Elect, Inst Semicond, Jinan 250014, Peoples R China |
| 推荐引用方式 GB/T 7714 | Shi, LW,Li, YG,Wang, Q,et al. Microstructure and photoluminescence performances of sic nanocrystals embedded in sio2 matrix by magnetron co-sputtering[J]. Rare metal materials and engineering,2005,34(7):1073-1076. |
| APA | Shi, LW,Li, YG,Wang, Q,Xue, CS,&Zhuang, HZ.(2005).Microstructure and photoluminescence performances of sic nanocrystals embedded in sio2 matrix by magnetron co-sputtering.Rare metal materials and engineering,34(7),1073-1076. |
| MLA | Shi, LW,et al."Microstructure and photoluminescence performances of sic nanocrystals embedded in sio2 matrix by magnetron co-sputtering".Rare metal materials and engineering 34.7(2005):1073-1076. |
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来源：半导体研究所
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