Fabrication and analysis of 2x2 thermo-optic soi waveguide switch with low power consumption and fast response by anisotropy chemical etching
文献类型：期刊论文
| 作者 | Liu, JW; Yu, JZ; Chen, SW; Xia, JS |
| 刊名 | Optics communications
 |
| 出版日期 | 2005-01-17 |
| 卷号 | 245期号:1-6页码:137-144 |
| 关键词 | Thermo-optic switch Silicon-on-insulator Anisotropy chemical etching Finite-element method Finite-difference beam propagation Switching time Power consumption |
| ISSN号 | 0030-4018 |
| DOI | 10.1016/j.optcom.2004.10.004 |
| 通讯作者 | Liu, jw(jwliu@red.semi.ac.cn) |
| 英文摘要 | A low power consumption 2 x 2 thermo-optic switch with fast response was fabricated on silicon-on-insulator by anisotropy chemical etching. blocking trenches were etched on both sides of the phase-shifting arms to shorten device length and reduce power consumption. thin top cladding layer was grown to reduce power consumption and switching time. the device showed good characteristics, including a low switching power of 145 mw and a fast switching speed of 8 +/- 1 mus, respectively. two-dimensional finite element method was applied to simulate temperature field in the phase-shifting arm instead of conventional one-dimensional method. according to the simulated result, a new two-dimensional index distribution of phase-shifting arm was determined. consequently finite-difference beam propagation method was employed to simulate the light propagation in the switch, and calculate the power consumption as well as the switching speed. the experimental results were in good agreement with the theoretical estimations. (c) 2004 elsevier b.v. all rights reserved. |
| WOS关键词 | SILICON |
| WOS研究方向 | Optics |
| WOS类目 | Optics |
| 语种 | 英语 |
| WOS记录号 | WOS:000226614300015 |
| 出版者 | ELSEVIER SCIENCE BV |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2426488 |
| 专题 | 半导体研究所 |
| 通讯作者 | Liu, JW |
| 作者单位 | Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Liu, JW,Yu, JZ,Chen, SW,et al. Fabrication and analysis of 2x2 thermo-optic soi waveguide switch with low power consumption and fast response by anisotropy chemical etching[J]. Optics communications,2005,245(1-6):137-144. |
| APA | Liu, JW,Yu, JZ,Chen, SW,&Xia, JS.(2005).Fabrication and analysis of 2x2 thermo-optic soi waveguide switch with low power consumption and fast response by anisotropy chemical etching.Optics communications,245(1-6),137-144. |
| MLA | Liu, JW,et al."Fabrication and analysis of 2x2 thermo-optic soi waveguide switch with low power consumption and fast response by anisotropy chemical etching".Optics communications 245.1-6(2005):137-144. |
入库方式： iSwitch采集
来源：半导体研究所
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