中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Post-growth and in situ annealing on gainnas(sb) and their application in 1.55 mu m lasers

文献类型:期刊论文

作者Zhao, H; Xu, YQ; Ni, HQ; Zhang, SY; Han, Q; Du, Y; Yang, XH; Wu, RH; Niu, ZC
刊名Semiconductor science and technology
出版日期2006-03-01
卷号21期号:3页码:279-282
ISSN号0268-1242
DOI10.1088/0268-1242/21/3/011
通讯作者Zhao, h(zhaohuan@red.semi.ac.cn)
英文摘要Rapid thermal annealing (rta) has been demonstrated as an important way to improve the crystal quality of gainnas(sb)/gaas quantum wells. however little investigation has been made into their application in laser growth, especially at a wavelength of 1.55 mu m. when a gaas-based laser is grown, algaas is usually used for cladding layers. the growth of the p-cladding layer usually takes 30-45 min at a growth temperature higher than that of the gainnas(sb) active region, which affects the material quality. to investigate this effect, various post-growth annealing processes were performed to simulate this process. great enhancement of the pl intensity was obtained by a two-step process which consisted of annealing first at 700 degrees c for 60 s and then at 600 degrees c for 45 min. we transferred this post-growth annealing to in situ annealing. finally, a gainnassb laser was grown with a 700 degrees c in situ annealing process. continuous operation at room temperature of a gaas-based dilute nitride laser with a wavelength beyond 1.55 mu m was realized for the first time.
WOS关键词MOLECULAR-BEAM EPITAXY ; IMPROVED LUMINESCENCE EFFICIENCY ; QUANTUM-WELLS ; ORIGIN
WOS研究方向Engineering ; Materials Science ; Physics
WOS类目Engineering, Electrical & Electronic ; Materials Science, Multidisciplinary ; Physics, Condensed Matter
语种英语
WOS记录号WOS:000236590100013
出版者IOP PUBLISHING LTD
URI标识http://www.irgrid.ac.cn/handle/1471x/2426568
专题半导体研究所
通讯作者Zhao, H
作者单位Chinese Acad Sci, Inst Semicond, Natl Lab Superlatt & Microstruct, Beijing 100083, Peoples R China
推荐引用方式
GB/T 7714
Zhao, H,Xu, YQ,Ni, HQ,et al. Post-growth and in situ annealing on gainnas(sb) and their application in 1.55 mu m lasers[J]. Semiconductor science and technology,2006,21(3):279-282.
APA Zhao, H.,Xu, YQ.,Ni, HQ.,Zhang, SY.,Han, Q.,...&Niu, ZC.(2006).Post-growth and in situ annealing on gainnas(sb) and their application in 1.55 mu m lasers.Semiconductor science and technology,21(3),279-282.
MLA Zhao, H,et al."Post-growth and in situ annealing on gainnas(sb) and their application in 1.55 mu m lasers".Semiconductor science and technology 21.3(2006):279-282.

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来源:半导体研究所

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