Zno thin films on si(111) grown by pulsed laser deposition from metallic zn target
文献类型：期刊论文
| 作者 | Zhao, Jie; Hu, Lizhong; Wang, Zhaoyang; Sun, Jie; Wang, Zhijun |
| 刊名 | Applied surface science
 |
| 出版日期 | 2006-11-15 |
| 卷号 | 253期号:2页码:841-845 |
| 关键词 | Zno Pulsed laser deposition Oxygen pressure Annealing X-ray diffraction Photoluminescence |
| ISSN号 | 0169-4332 |
| DOI | 10.1016/j.apsusc.2006.01.018 |
| 通讯作者 | Zhao, jie(jiezhao@student.dlut.edu.cn) |
| 英文摘要 | Zno thin films with highly c-axis orientation have been fabricated on p-type si(1 1 1) substrates at 400 degrees c by pulsed laser deposition (pld) from a metallic zn target with oxygen pressures between 0.1 and 0.7 mbar. experimental results indicate that the films deposited at 0.3 and 0.5 mbar have better crystalline and optical quality and flatter surfaces than the films prepared at other pressures. the full width at half maximum (fwhm) of (0 0 0 2) diffraction peak decreases remarkably from 0.46 to 0.19 degrees with increasing annealing temperature for the film prepared at 0.3 mbar. in photoluminescence (pl) spectra at room temperature, the annealed film at 700 degrees c exhibits a smaller ultraviolet (uv) peak fwhm of 108 mev than the as-grown film (119 mev). however, an enhanced deep-level emission is observed. possible origins to above results are discussed. (c) 2006 elsevier b.v. all rights reserved. |
| WOS关键词 | ULTRAVIOLET EMISSION ; ROOM-TEMPERATURE ; ZINC-OXIDE |
| WOS研究方向 | Chemistry ; Materials Science ; Physics |
| WOS类目 | Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter |
| 语种 | 英语 |
| WOS记录号 | WOS:000242647800071 |
| 出版者 | ELSEVIER SCIENCE BV |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2426673 |
| 专题 | 半导体研究所 |
| 通讯作者 | Zhao, Jie |
| 作者单位 | 1.Dalian Univ Technol, State Key Lab Mat Modificat Laser Ion Electron Be, Dept Phys, Dalian 116024, Peoples R China 2.Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhao, Jie,Hu, Lizhong,Wang, Zhaoyang,et al. Zno thin films on si(111) grown by pulsed laser deposition from metallic zn target[J]. Applied surface science,2006,253(2):841-845. |
| APA | Zhao, Jie,Hu, Lizhong,Wang, Zhaoyang,Sun, Jie,&Wang, Zhijun.(2006).Zno thin films on si(111) grown by pulsed laser deposition from metallic zn target.Applied surface science,253(2),841-845. |
| MLA | Zhao, Jie,et al."Zno thin films on si(111) grown by pulsed laser deposition from metallic zn target".Applied surface science 253.2(2006):841-845. |
入库方式： iSwitch采集
来源：半导体研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。