中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
A photonic wire-based directional coupler based on soi

文献类型:期刊论文

作者Quan Yu-jun; Han Pei-de; Ran Qi-jiang; Zeng Fan-ping; Gao Li-peng; Zhao Chun-hua
刊名Optics communications
出版日期2008-06-01
卷号281期号:11页码:3105-3110
关键词Silicon photonics Optical waveguide Directional coupler Sub-micron Silicon-on-insulator (soi)
ISSN号0030-4018
DOI10.1016/j.optcom.2008.02.007
通讯作者Quan yu-jun(fatreny@red.semi.ac.cn)
英文摘要A photonic wire-based directional coupler based on soi was fabricated by e-beam lithography (ebl) and the inductively coupled plasma (icp) etching method. the size of the sub-micron waveguide is 0.34 mu m x 0.34 mu m, and the length in the coupling region and the separation between the two parallel waveguides are 410 and 0.8 mu m, respectively. the measurement results are in good agreement with the results simulated by 3d finite-difference time-domain method. the transmission power from two output ports changed reciprocally with about 23 nm wavelength spacing between the coupled and direct ports. the extinction ratio of the device was between 5 and 10 db, and the insertion loss of the device in the wavelength range 1520-1610 nm was between 22 and 24 db, which included an about 18.4 +/- 0.4 db coupling loss between the taper fibers and the polished sides of the device. (c) 2008 elsevier b.v. all rights reserved.
WOS关键词SILICON-ON-INSULATOR
WOS研究方向Optics
WOS类目Optics
语种英语
WOS记录号WOS:000255575400015
出版者ELSEVIER SCIENCE BV
URI标识http://www.irgrid.ac.cn/handle/1471x/2427465
专题半导体研究所
通讯作者Quan Yu-jun
作者单位Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
推荐引用方式
GB/T 7714
Quan Yu-jun,Han Pei-de,Ran Qi-jiang,et al. A photonic wire-based directional coupler based on soi[J]. Optics communications,2008,281(11):3105-3110.
APA Quan Yu-jun,Han Pei-de,Ran Qi-jiang,Zeng Fan-ping,Gao Li-peng,&Zhao Chun-hua.(2008).A photonic wire-based directional coupler based on soi.Optics communications,281(11),3105-3110.
MLA Quan Yu-jun,et al."A photonic wire-based directional coupler based on soi".Optics communications 281.11(2008):3105-3110.

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来源:半导体研究所

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