A photonic wire-based directional coupler based on soi
文献类型:期刊论文
作者 | Quan Yu-jun; Han Pei-de; Ran Qi-jiang; Zeng Fan-ping; Gao Li-peng; Zhao Chun-hua |
刊名 | Optics communications
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出版日期 | 2008-06-01 |
卷号 | 281期号:11页码:3105-3110 |
关键词 | Silicon photonics Optical waveguide Directional coupler Sub-micron Silicon-on-insulator (soi) |
ISSN号 | 0030-4018 |
DOI | 10.1016/j.optcom.2008.02.007 |
通讯作者 | Quan yu-jun(fatreny@red.semi.ac.cn) |
英文摘要 | A photonic wire-based directional coupler based on soi was fabricated by e-beam lithography (ebl) and the inductively coupled plasma (icp) etching method. the size of the sub-micron waveguide is 0.34 mu m x 0.34 mu m, and the length in the coupling region and the separation between the two parallel waveguides are 410 and 0.8 mu m, respectively. the measurement results are in good agreement with the results simulated by 3d finite-difference time-domain method. the transmission power from two output ports changed reciprocally with about 23 nm wavelength spacing between the coupled and direct ports. the extinction ratio of the device was between 5 and 10 db, and the insertion loss of the device in the wavelength range 1520-1610 nm was between 22 and 24 db, which included an about 18.4 +/- 0.4 db coupling loss between the taper fibers and the polished sides of the device. (c) 2008 elsevier b.v. all rights reserved. |
WOS关键词 | SILICON-ON-INSULATOR |
WOS研究方向 | Optics |
WOS类目 | Optics |
语种 | 英语 |
WOS记录号 | WOS:000255575400015 |
出版者 | ELSEVIER SCIENCE BV |
URI标识 | http://www.irgrid.ac.cn/handle/1471x/2427465 |
专题 | 半导体研究所 |
通讯作者 | Quan Yu-jun |
作者单位 | Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China |
推荐引用方式 GB/T 7714 | Quan Yu-jun,Han Pei-de,Ran Qi-jiang,et al. A photonic wire-based directional coupler based on soi[J]. Optics communications,2008,281(11):3105-3110. |
APA | Quan Yu-jun,Han Pei-de,Ran Qi-jiang,Zeng Fan-ping,Gao Li-peng,&Zhao Chun-hua.(2008).A photonic wire-based directional coupler based on soi.Optics communications,281(11),3105-3110. |
MLA | Quan Yu-jun,et al."A photonic wire-based directional coupler based on soi".Optics communications 281.11(2008):3105-3110. |
入库方式: iSwitch采集
来源:半导体研究所
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