Multi-wafer 3c-sic heteroepitaxial growth on si(100) substrates
文献类型：期刊论文
| 作者 | Sun Guo-Sheng1,2; Liu Xing-Fang1,2; Wang Lei2; Zhao Wan-Shun2; Yang Ting2; Wu Hai-Lei2; Yan Guo-Guo2; Zhao Yong-Mei3; Ning Jin3; Zeng Yi-Ping1,2 |
| 刊名 | Chinese physics b
 |
| 出版日期 | 2010-08-01 |
| 卷号 | 19期号:8页码:5 |
| 关键词 | 3c-sic Heteroepitaxial Multi-wafer Uniformity |
| ISSN号 | 1674-1056 |
| 通讯作者 | Sun guo-sheng(gshsun@red.semi.ac.cn) |
| 英文摘要 | Epitaxial growth of semiconductor films in multiple-wafer mode is under vigorous development in order to improve yield output to meet the industry increasing demands. here we report on results of the heteroepitaxial growth of multi-wafer 3c-sic films on si(100) substrates by employing a home-made horizontal hot wall low pressure chemical vapour deposition (hwlpcvd) system which was designed to be have a high-throughput, multi-wafer (3x2-inch) capacity. 3c-sic film properties of the intra-wafer and the wafer-to-wafer including crystalline morphologies, structures and electronics are characterized systematically. the undoped and the moderate nh(3) doped n-type 3c-sic films with specular surface are grown in the hwlpcvd, thereafter uniformities of intra-wafer thickness and sheet resistance of the 3c-sic films are obtained to be 6%similar to 7% and 6.7%similar to 8%, respectively, and within a run, the deviations of wafer-to-wafer thickness and sheet resistance are less than 1% and 0.8%, respectively. |
| WOS关键词 | SILICON-CARBIDE ; FILMS ; SI ; DEPOSITION ; DEVICES ; WAFERS ; MEMS |
| WOS研究方向 | Physics |
| WOS类目 | Physics, Multidisciplinary |
| 语种 | 英语 |
| WOS记录号 | WOS:000280741800091 |
| 出版者 | IOP PUBLISHING LTD |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2427928 |
| 专题 | 半导体研究所 |
| 通讯作者 | Sun Guo-Sheng |
| 作者单位 | 1.Chinese Acad Sci, Key Lab Semicond Mat Sci, Inst Semicond, Beijing 100083, Peoples R China 2.Chinese Acad Sci, Ctr Mat Sci, Inst Semicond, Beijing 100083, Peoples R China 3.Chinese Acad Sci, State Key Lab Transducer Technol, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Sun Guo-Sheng,Liu Xing-Fang,Wang Lei,et al. Multi-wafer 3c-sic heteroepitaxial growth on si(100) substrates[J]. Chinese physics b,2010,19(8):5. |
| APA | Sun Guo-Sheng.,Liu Xing-Fang.,Wang Lei.,Zhao Wan-Shun.,Yang Ting.,...&Li Jin-Min.(2010).Multi-wafer 3c-sic heteroepitaxial growth on si(100) substrates.Chinese physics b,19(8),5. |
| MLA | Sun Guo-Sheng,et al."Multi-wafer 3c-sic heteroepitaxial growth on si(100) substrates".Chinese physics b 19.8(2010):5. |
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来源：半导体研究所
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