Si nanopillar arrays with nanocrystals produced by template-induced growth at room temperature
文献类型：期刊论文
| 作者 | Bai An-Qi; Zheng Jun; Tao Ye-Liao; Zuo Yu-Hua; Xue Chun-Lai; Cheng Bu-Wen; Wang Qi-Ming |
| 刊名 | Chinese physics b
 |
| 出版日期 | 2011-11-01 |
| 卷号 | 20期号:11页码:6 |
| 关键词 | Silicon nanopillar arrays Porous anodic alumina Nanocrystal Room temperature |
| ISSN号 | 1674-1056 |
| DOI | 10.1088/1674-1056/20/11/116103 |
| 通讯作者 | Cheng bu-wen(cbw@semi.ac.cn) |
| 英文摘要 | Well-aligned and closely-packed silicon nanopillar (snp) arrays are fabricated by using a simple method with magnetron sputtering of si on a porous anodic alumina (paa) template at room temperature. the snps are formed by selective growth on the top of the paa pore walls. the growth mechanism analysis indicates that the structure of the snps can be modulated by the pore spacing of the paa and the sputtering process and is independent of the wall width of the paa. moreover, nanocrystals are identified by using transmission electron microscopy in the as-deposited snp samples, which are related to the heat isolation structure of the snps. the raman focus depth profile reveals a high crystallization ratio on the surface. |
| WOS关键词 | SOLAR-CELLS ; SILICON |
| WOS研究方向 | Physics |
| WOS类目 | Physics, Multidisciplinary |
| 语种 | 英语 |
| WOS记录号 | WOS:000298491700060 |
| 出版者 | IOP PUBLISHING LTD |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2428186 |
| 专题 | 半导体研究所 |
| 通讯作者 | Cheng Bu-Wen |
| 作者单位 | Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Bai An-Qi,Zheng Jun,Tao Ye-Liao,et al. Si nanopillar arrays with nanocrystals produced by template-induced growth at room temperature[J]. Chinese physics b,2011,20(11):6. |
| APA | Bai An-Qi.,Zheng Jun.,Tao Ye-Liao.,Zuo Yu-Hua.,Xue Chun-Lai.,...&Wang Qi-Ming.(2011).Si nanopillar arrays with nanocrystals produced by template-induced growth at room temperature.Chinese physics b,20(11),6. |
| MLA | Bai An-Qi,et al."Si nanopillar arrays with nanocrystals produced by template-induced growth at room temperature".Chinese physics b 20.11(2011):6. |
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来源：半导体研究所
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