Microstructure of poly-si thin films prepared at low temperatures
文献类型：期刊论文
| 作者 | Zhu, M; Cao, Y; Guo, X; Liu, J; He, M; Sun, K |
| 刊名 | Solar energy materials and solar cells
 |
| 出版日期 | 2000-04-15 |
| 卷号 | 62期号:1-2页码:109-115 |
| 关键词 | Poly-si Hot wire chemical vapor deposition Microstructure |
| ISSN号 | 0927-0248 |
| 通讯作者 | Zhu, m() |
| 英文摘要 | Microstructures of hydrogenated polycrystalline silicon (poly-si) and microcrystalline silicon (mu c-si:h) thin films prepared by hot wire chemical vapor deposition (hwcvd) with hydrogen dilution of silane have been studied. the columnar crystal growth of the film was clearly visible tarting from substrate. the transmission electron diffraction (ted) showed the typical porycrystalline material with small crystals. the (1 1 1) preferential grain was observed in poly-si films. the 2100 cm(-1) stretching vibration mode splits into two modes centered at around 2082 and 2098 cm(-1) which are suggested to be the si-h modes at the nanocrystalline si (1 1 1) and (1 1 0)surfaces, respectively. (c) 2000 elsevier science b.v. all rights reserved. |
| WOS关键词 | CHEMICAL-VAPOR-DEPOSITION ; MICROCRYSTALLINE SILICON ; HYDROGEN ; SPECTRA |
| WOS研究方向 | Energy & Fuels ; Materials Science ; Physics |
| WOS类目 | Energy & Fuels ; Materials Science, Multidisciplinary ; Physics, Applied |
| 语种 | 英语 |
| WOS记录号 | WOS:000086583800011 |
| 出版者 | ELSEVIER SCIENCE BV |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2428856 |
| 专题 | 半导体研究所 |
| 通讯作者 | Zhu, M |
| 作者单位 | 1.Univ Sci & Technol China, Dept Phys, Grad Sch, Beijing 100039, Peoples R China 2.Chinese Acad Sci, Lab Semicond Mat Sci, Beijing 100039, Peoples R China 3.Dalian Inst Technol, Dalian 116024, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhu, M,Cao, Y,Guo, X,et al. Microstructure of poly-si thin films prepared at low temperatures[J]. Solar energy materials and solar cells,2000,62(1-2):109-115. |
| APA | Zhu, M,Cao, Y,Guo, X,Liu, J,He, M,&Sun, K.(2000).Microstructure of poly-si thin films prepared at low temperatures.Solar energy materials and solar cells,62(1-2),109-115. |
| MLA | Zhu, M,et al."Microstructure of poly-si thin films prepared at low temperatures".Solar energy materials and solar cells 62.1-2(2000):109-115. |
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来源：半导体研究所
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