Phase unwrapping in optical metrology via denoised and convolutional segmentation networks
文献类型：期刊论文
| 作者 | Zhang JC(张俊超)1,2,3 ; Shao, Jianbo2; Luo HB(罗海波)3; Liang, Rongguang2; Tian, Xiaobo2
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| 刊名 | OPTICS EXPRESS
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| 出版日期 | 2019 |
| 卷号 | 27期号:10页码:14903-14912 |
| ISSN号 | 1094-4087 |
| 产权排序 | 1 |
| 英文摘要 | The interferometry technique is corn commonly used to obtain the phase information of an object in optical metrology. The obtained wrapped phase is subject to a 27 pi ambiguity. To remove the ambiguity and obtain the correct phase, phase unwrapping is essential. Conventional phase unwrapping approaches are time-consuming and noise sensitive. To address those issues, we propose a new approach, where we transfer the task of phase unwrapping into a multi-class classification problem and introduce an efficient segmentation network to identify classes. Moreover, a noise-to-noise denoised network is integrated to preprocess noisy wrapped phase. We have demonstrated the proposed method with simulated data and in a real interferometric system. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement |
| WOS关键词 | TRANSPORT |
| 资助项目 | China Scholarship Council (CSC)[201704910730] ; National Science Foundation (NSF)[1455630] |
| WOS研究方向 | Optics |
| 语种 | 英语 |
| WOS记录号 | WOS:000469220500113 |
| 资助机构 | China Scholarship Council (CSC) ; National Science Foundation (NSF) |
| 源URL | [http://ir.sia.cn/handle/173321/24727]  |
| 专题 | 沈阳自动化研究所_光电信息技术研究室 |
| 通讯作者 | Liang, Rongguang |
| 作者单位 | 1.University of Chinese Academy of Sciences, Beijing 100049, China 2.College of Optical Sciences, University of Arizona, Tucson, AZ 85721, United States 3.Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China |
| 推荐引用方式 GB/T 7714 | Zhang JC,Shao, Jianbo,Luo HB,et al. Phase unwrapping in optical metrology via denoised and convolutional segmentation networks[J]. OPTICS EXPRESS,2019,27(10):14903-14912. |
| APA | Zhang JC,Shao, Jianbo,Luo HB,Liang, Rongguang,&Tian, Xiaobo.(2019).Phase unwrapping in optical metrology via denoised and convolutional segmentation networks.OPTICS EXPRESS,27(10),14903-14912. |
| MLA | Zhang JC,et al."Phase unwrapping in optical metrology via denoised and convolutional segmentation networks".OPTICS EXPRESS 27.10(2019):14903-14912. |
入库方式： OAI收割
来源：沈阳自动化研究所
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