Flatness measurement of large flat with two-station laser trackers
文献类型:期刊论文
作者 | Li, Jie; Yang, Jie; Wu, Shibin; Cao, Xuedong |
刊名 | INTERNATIONAL JOURNAL OF OPTOMECHATRONICS |
出版日期 | 2018 |
卷号 | 12期号:1页码:53-62 |
ISSN号 | 1559-9612 |
关键词 | Flatness measurement large-scale metrology error compensation coordinate measuring machine laser tracker |
DOI | 10.1080/15599612.2018.1529846 |
文献子类 | J |
英文摘要 | We present a novel method to accurately measure the flatness of a large flat. The method can be seen as a task-specific error correction of the laser tracker. Laser trackers are positioned at two specific measuring stations and measure the coordinates of the same sample points. The angular errors of the primary laser tracker are compensated with constraint information provided by an additional laser tracker. Using this method, we measure the flatness of a 4.5m flat. The flatness measurement uncertainty is 1.4 mu m in rms (root mean square). |
语种 | 英语 |
WOS记录号 | WOS:000455367600001 |
源URL | [http://ir.ioe.ac.cn/handle/181551/9291] |
专题 | 光电技术研究所_质量处(质检中心) |
作者单位 | Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China |
推荐引用方式 GB/T 7714 | Li, Jie,Yang, Jie,Wu, Shibin,et al. Flatness measurement of large flat with two-station laser trackers[J]. INTERNATIONAL JOURNAL OF OPTOMECHATRONICS,2018,12(1):53-62. |
APA | Li, Jie,Yang, Jie,Wu, Shibin,&Cao, Xuedong.(2018).Flatness measurement of large flat with two-station laser trackers.INTERNATIONAL JOURNAL OF OPTOMECHATRONICS,12(1),53-62. |
MLA | Li, Jie,et al."Flatness measurement of large flat with two-station laser trackers".INTERNATIONAL JOURNAL OF OPTOMECHATRONICS 12.1(2018):53-62. |
入库方式: OAI收割
来源:光电技术研究所
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