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Chinese Academy of Sciences Institutional Repositories Grid
An explanation for laser-induced spallation effect in a-C:H films: Altered phase evolution route caused by hydrogen doping

文献类型:期刊论文

作者Ding, Qi1,2; Wang, Liping1; Hu, Litian1; Hu, Tianchang1,2; Wang, Yunfeng1; Zhang, Yaonan3
刊名JOURNAL OF APPLIED PHYSICS
出版日期2011
卷号109期号:1页码:9
ISSN号0021-8979
DOI10.1063/1.3528223
通讯作者Ding, Qi()
英文摘要The laser-induced spalling effect has been recognized as a unique phenomenon for amorphous carbon (a-C) films during laser processing. In this work, the origin of spalling effect was investigated by ablating two different types of a-C film: hydrogenated a-C (a-C:H) and nonhydrogenated a-C with an Nd-yttrium aluminum garnet laser system. Comparisons of ablating results demonstrated that the spalling effect only occurred in a-C: H rather than nonhydrogenated a-C. Laser heating simulation indicated that the temperature distributions in both films after laser pulse are similar with a high temperature gradient in depth direction. Annealing test results, Raman spectra and nanoindentation show that with the increase in annealing temperature, a-C film transforms into grassy carbon directly, while a-C:H experiences two subprocess under heating: the hydrogen mobilization and rearrangement of C-C network at a relatively low temperature range resulting in a denser C-C network and raised film density; the graphitization at high temperature which would lower the film density. We propose that the reason of laser-induced spalling effect in a-C: H might depend on two aspects: (1) the heat source like laser pulse which could produce a high temperature gradient in depth direction within ultrashort time and (2) the unique evolution process of film microstructure under heating. Based on above model, the spalling effect is ascribed to the concentrated stress caused by different structure evolution subprocess at different depth in a-C: H during the laser irradiation. It is remarkable that the conclusions deduced from our model are proven to be in good agreement with our experimental results and the previous articles reported by others. (C) 2011 American Institute of Physics. [doi:10.1063/1.3528223]
收录类别SCI
WOS关键词DIAMOND-LIKE-CARBON ; AMORPHOUS-CARBON ; THERMAL-STABILITY ; SUPERLOW-FRICTION ; PULSE DURATION ; HEAT-CAPACITY ; THIN-FILMS ; SURFACE ; GRAPHITIZATION ; LUBRICATION
WOS研究方向Physics
WOS类目Physics, Applied
语种英语
WOS记录号WOS:000286219300026
出版者AMER INST PHYSICS
URI标识http://www.irgrid.ac.cn/handle/1471x/2556587
专题寒区旱区环境与工程研究所
通讯作者Ding, Qi
作者单位1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China
2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
3.Chinese Acad Sci, Cold & Arid Reg Environm & Engn Res Inst, Lanzhou 730000, Peoples R China
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Ding, Qi,Wang, Liping,Hu, Litian,et al. An explanation for laser-induced spallation effect in a-C:H films: Altered phase evolution route caused by hydrogen doping[J]. JOURNAL OF APPLIED PHYSICS,2011,109(1):9.
APA Ding, Qi,Wang, Liping,Hu, Litian,Hu, Tianchang,Wang, Yunfeng,&Zhang, Yaonan.(2011).An explanation for laser-induced spallation effect in a-C:H films: Altered phase evolution route caused by hydrogen doping.JOURNAL OF APPLIED PHYSICS,109(1),9.
MLA Ding, Qi,et al."An explanation for laser-induced spallation effect in a-C:H films: Altered phase evolution route caused by hydrogen doping".JOURNAL OF APPLIED PHYSICS 109.1(2011):9.

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