A Process Study of Organic/Inorganic Film Materials Deposited by ICP-PECVD at Low Temperature
文献类型：期刊论文
| 作者 | Qu FR(屈芙蓉); Liu J(刘键); Leng XL(冷兴龙) |
| 刊名 | Key Engineering Materials
 |
| 出版日期 | 2017-08-28 |
| 文献子类 | 期刊论文 |
| 源URL | [http://159.226.55.106/handle/172511/18068]  |
| 专题 | 微电子研究所_微电子仪器设备研发中心 |
| 推荐引用方式 GB/T 7714 | Qu FR,Liu J,Leng XL. A Process Study of Organic/Inorganic Film Materials Deposited by ICP-PECVD at Low Temperature[J]. Key Engineering Materials,2017. |
| APA | 屈芙蓉,刘键,&冷兴龙.(2017).A Process Study of Organic/Inorganic Film Materials Deposited by ICP-PECVD at Low Temperature.Key Engineering Materials. |
| MLA | 屈芙蓉,et al."A Process Study of Organic/Inorganic Film Materials Deposited by ICP-PECVD at Low Temperature".Key Engineering Materials (2017). |
入库方式： OAI收割
来源：微电子研究所
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