Study of SiGe selective epitaxial process integration with high-k and metal gate for 16/14 nm nodes FinFET technology
文献类型:期刊论文
作者 | Wang GL(王桂磊); Qin ZL(秦长亮); Yin HX(殷华湘); Duan NY(段宁远); Yang T(杨涛); Li JF(李俊峰); Yan J(闫江); Zhu HL(朱慧珑) |
刊名 | Microelectronics Engineering |
出版日期 | 2016-06-01 |
文献子类 | 期刊论文 |
源URL | [http://159.226.55.106/handle/172511/16195] |
专题 | 微电子研究所_集成电路先导工艺研发中心 |
推荐引用方式 GB/T 7714 | Wang GL,Qin ZL,Yin HX,et al. Study of SiGe selective epitaxial process integration with high-k and metal gate for 16/14 nm nodes FinFET technology[J]. Microelectronics Engineering,2016. |
APA | 王桂磊.,秦长亮.,殷华湘.,段宁远.,杨涛.,...&朱慧珑.(2016).Study of SiGe selective epitaxial process integration with high-k and metal gate for 16/14 nm nodes FinFET technology.Microelectronics Engineering. |
MLA | 王桂磊,et al."Study of SiGe selective epitaxial process integration with high-k and metal gate for 16/14 nm nodes FinFET technology".Microelectronics Engineering (2016). |
入库方式: OAI收割
来源:微电子研究所
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