Quad-cantilever microsensors with a low-cost single-sided micro-machining technique for trace chemical vapor detection
文献类型：期刊论文
| 作者 | Yang, YL ; Chen, Y ; Xu, PC ; Li, XX |
| 刊名 | MICROELECTRONIC ENGINEERING
 |
| 出版日期 | 2010 |
| 卷号 | 87期号:11页码:2317-2322 |
| 关键词 | PIEZORESISTIVE READ-OUT SENSOR MICROCANTILEVERS TMAH/IPA MODEL |
| ISSN号 | 0167-9317 |
| 通讯作者 | Li, XX, Chinese Acad Sci, State Key Lab Transducer Technol, Shanghai Inst Microsyst & Informat Technol, 865 Changning Rd, Shanghai 200050, Peoples R China |
| 学科主题 | Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Optics; Physics, Applied |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2011-12-17 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/38390]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Yang, YL,Chen, Y,Xu, PC,et al. Quad-cantilever microsensors with a low-cost single-sided micro-machining technique for trace chemical vapor detection[J]. MICROELECTRONIC ENGINEERING,2010,87(11):2317-2322. |
| APA | Yang, YL,Chen, Y,Xu, PC,&Li, XX.(2010).Quad-cantilever microsensors with a low-cost single-sided micro-machining technique for trace chemical vapor detection.MICROELECTRONIC ENGINEERING,87(11),2317-2322. |
| MLA | Yang, YL,et al."Quad-cantilever microsensors with a low-cost single-sided micro-machining technique for trace chemical vapor detection".MICROELECTRONIC ENGINEERING 87.11(2010):2317-2322. |
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