A dynamic collision model for improved over-range protection of cantilever-mass micromechanical accelerometers
文献类型：期刊论文
| 作者 | Yang, YL ; Jiang, W ; Zhang, K ; Liu, M ; Li, XX |
| 刊名 | MICROELECTRONICS JOURNAL
 |
| 出版日期 | 2010 |
| 卷号 | 41期号:6页码:331-337 |
| 关键词 | PIEZORESISTIVE ACCELEROMETERS FABRICATION |
| ISSN号 | 0026-2692 |
| 通讯作者 | Li, XX, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, 865 Changning Rd, Shanghai 200050, Peoples R China |
| 学科主题 | Engineering, Electrical & Electronic; Nanoscience & Nanotechnology |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2011-12-17 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/38407]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Yang, YL,Jiang, W,Zhang, K,et al. A dynamic collision model for improved over-range protection of cantilever-mass micromechanical accelerometers[J]. MICROELECTRONICS JOURNAL,2010,41(6):331-337. |
| APA | Yang, YL,Jiang, W,Zhang, K,Liu, M,&Li, XX.(2010).A dynamic collision model for improved over-range protection of cantilever-mass micromechanical accelerometers.MICROELECTRONICS JOURNAL,41(6),331-337. |
| MLA | Yang, YL,et al."A dynamic collision model for improved over-range protection of cantilever-mass micromechanical accelerometers".MICROELECTRONICS JOURNAL 41.6(2010):331-337. |
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