A novel electrostatic-driven tuning fork micromachined gyroscope with a bar structure operating at atmospheric pressure
文献类型：期刊论文
| 作者 | Che,LF ; Xiong,B ; Li,YF ; Wang,YL |
| 刊名 | JOURNAL OF MICROMECHANICS AND MICROENGINEERING
 |
| 出版日期 | 2010 |
| 卷号 | 20期号:1页码:15025-15025 |
| ISSN号 | 0960-1317 |
| 通讯作者 | Che, LF, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, 865 Changning Rd, Shanghai 200050, Peoples R China |
| 学科主题 | Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2011-12-17 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/38441]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Che,LF,Xiong,B,Li,YF,et al. A novel electrostatic-driven tuning fork micromachined gyroscope with a bar structure operating at atmospheric pressure[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2010,20(1):15025-15025. |
| APA | Che,LF,Xiong,B,Li,YF,&Wang,YL.(2010).A novel electrostatic-driven tuning fork micromachined gyroscope with a bar structure operating at atmospheric pressure.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,20(1),15025-15025. |
| MLA | Che,LF,et al."A novel electrostatic-driven tuning fork micromachined gyroscope with a bar structure operating at atmospheric pressure".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 20.1(2010):15025-15025. |
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