Resonant-cantilever bio/chemical sensors with an integrated heater for both resonance exciting optimization and sensing repeatability enhancement
文献类型:期刊论文
| 作者 | Yu, HT ; Li, XX ; Gan, XH ; Liu, YJ ; Liu, X ; Xu, PC ; Li, JG ; Liu, M |
| 刊名 | JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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| 出版日期 | 2009 |
| 卷号 | 19期号:4页码:45023-45023 |
| 关键词 | FORCE MICROSCOPY FREQUENCY MICROCANTILEVERS EXCITATION DEPENDENCE |
| ISSN号 | 0960-1317 |
| 通讯作者 | Li, XX, Chinese Acad Sci, State Key Lab Transducer Technol, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China |
| 学科主题 | Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2011-12-17 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/38484] ![]() |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Yu, HT,Li, XX,Gan, XH,et al. Resonant-cantilever bio/chemical sensors with an integrated heater for both resonance exciting optimization and sensing repeatability enhancement[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2009,19(4):45023-45023. |
| APA | Yu, HT.,Li, XX.,Gan, XH.,Liu, YJ.,Liu, X.,...&Liu, M.(2009).Resonant-cantilever bio/chemical sensors with an integrated heater for both resonance exciting optimization and sensing repeatability enhancement.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,19(4),45023-45023. |
| MLA | Yu, HT,et al."Resonant-cantilever bio/chemical sensors with an integrated heater for both resonance exciting optimization and sensing repeatability enhancement".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 19.4(2009):45023-45023. |
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