A silicon integrated micro nano-positioning XY-stage for nano-manipulation
文献类型：期刊论文
| 作者 | Sun, LN ; Wang, JC ; Rong, WB ; Li, XX ; Bao, HF |
| 刊名 | JOURNAL OF MICROMECHANICS AND MICROENGINEERING
 |
| 出版日期 | 2008 |
| 卷号 | 18期号:12页码:-125004 |
| 关键词 | COMB-DRIVE ACTUATORS PIEZORESISTIVE ACCELEROMETER DATA-STORAGE |
| ISSN号 | 0960-1317 |
| 通讯作者 | Sun, LN, Harbin Inst Technol, State Key Lab Robot & Syst, Harbin 150001, Heilongjiang, Peoples R China |
| 学科主题 | Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2011-12-17 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/38509]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Sun, LN,Wang, JC,Rong, WB,et al. A silicon integrated micro nano-positioning XY-stage for nano-manipulation[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2008,18(12):-125004. |
| APA | Sun, LN,Wang, JC,Rong, WB,Li, XX,&Bao, HF.(2008).A silicon integrated micro nano-positioning XY-stage for nano-manipulation.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,18(12),-125004. |
| MLA | Sun, LN,et al."A silicon integrated micro nano-positioning XY-stage for nano-manipulation".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 18.12(2008):-125004. |
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