Single-Wafer-Processed Self-Testable High-g Accelerometers With Both Sensing and Actuating Elements Integrated on Trench-Sidewall
文献类型：期刊论文
| 作者 | Li, XX ; Gui, L ; Wang, YL ; Yang, H |
| 刊名 | IEEE SENSORS JOURNAL
 |
| 出版日期 | 2008 |
| 卷号 | 8期号:11-12页码:1992-1999 |
| 关键词 | PIEZORESISTIVE ACCELEROMETER SILICON ACCELEROMETER RANGE |
| ISSN号 | 1530-437X |
| 通讯作者 | Li, XX, Acad Sinica, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China |
| 学科主题 | Engineering, Electrical & Electronic; Instruments & Instrumentation; Physics, Applied |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2011-12-17 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/38511]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Li, XX,Gui, L,Wang, YL,et al. Single-Wafer-Processed Self-Testable High-g Accelerometers With Both Sensing and Actuating Elements Integrated on Trench-Sidewall[J]. IEEE SENSORS JOURNAL,2008,8(11-12):1992-1999. |
| APA | Li, XX,Gui, L,Wang, YL,&Yang, H.(2008).Single-Wafer-Processed Self-Testable High-g Accelerometers With Both Sensing and Actuating Elements Integrated on Trench-Sidewall.IEEE SENSORS JOURNAL,8(11-12),1992-1999. |
| MLA | Li, XX,et al."Single-Wafer-Processed Self-Testable High-g Accelerometers With Both Sensing and Actuating Elements Integrated on Trench-Sidewall".IEEE SENSORS JOURNAL 8.11-12(2008):1992-1999. |
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