Variable capacitors and tunable LC-tanks formed by CMOS-compatible metal MEMS for RF ICs
文献类型：期刊论文
| 作者 | Gu, L ; Li, XX |
| 刊名 | 2007 IEEE INTERNATIONAL ELECTRON DEVICES MEETING, VOLS 1 AND 2
 |
| 出版日期 | 2007 |
| 页码 | 427-430 |
| 关键词 | LARGE TUNING RANGE |
| 通讯作者 | Gu, L, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, 865 Changning Rd, Shanghai 200050, Peoples R China |
| 学科主题 | Engineering, Multidisciplinary; Engineering, Electrical & Electronic |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2011-12-17 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/38519]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Gu, L,Li, XX. Variable capacitors and tunable LC-tanks formed by CMOS-compatible metal MEMS for RF ICs[J]. 2007 IEEE INTERNATIONAL ELECTRON DEVICES MEETING, VOLS 1 AND 2,2007:427-430. |
| APA | Gu, L,&Li, XX.(2007).Variable capacitors and tunable LC-tanks formed by CMOS-compatible metal MEMS for RF ICs.2007 IEEE INTERNATIONAL ELECTRON DEVICES MEETING, VOLS 1 AND 2,427-430. |
| MLA | Gu, L,et al."Variable capacitors and tunable LC-tanks formed by CMOS-compatible metal MEMS for RF ICs".2007 IEEE INTERNATIONAL ELECTRON DEVICES MEETING, VOLS 1 AND 2 (2007):427-430. |
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