A novel capacitive accelerometer with an eight-beam-mass structure by self-stop anisotropic etching of (100) silicon
文献类型：期刊论文
| 作者 | Xiao, F ; Che, LF ; Xiong, B ; Wang, YL ; Zhou, XF ; Li, YF ; Lin, YL |
| 刊名 | JOURNAL OF MICROMECHANICS AND MICROENGINEERING
 |
| 出版日期 | 2008 |
| 卷号 | 18期号:7页码:75005-75005 |
| 关键词 | FABRICATION |
| ISSN号 | 0960-1317 |
| 通讯作者 | Che, LF, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, 865 Changning Rd, Shanghai 200050, Peoples R China |
| 学科主题 | Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2011-12-17 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/38539]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Xiao, F,Che, LF,Xiong, B,et al. A novel capacitive accelerometer with an eight-beam-mass structure by self-stop anisotropic etching of (100) silicon[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2008,18(7):75005-75005. |
| APA | Xiao, F.,Che, LF.,Xiong, B.,Wang, YL.,Zhou, XF.,...&Lin, YL.(2008).A novel capacitive accelerometer with an eight-beam-mass structure by self-stop anisotropic etching of (100) silicon.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,18(7),75005-75005. |
| MLA | Xiao, F,et al."A novel capacitive accelerometer with an eight-beam-mass structure by self-stop anisotropic etching of (100) silicon".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 18.7(2008):75005-75005. |
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