A new symmetrical beam-mass structure for accelerometers by anisotropic etching without convex corner compensation
文献类型：期刊论文
| 作者 | Xiao, F ; Che, LF ; Fan, KB ; Xiong, B ; Wang, YL |
| 刊名 | 2008 3RD IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3
 |
| 出版日期 | 2008 |
| 页码 | 1059-1062 |
| 通讯作者 | Che, LF, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, 865 Changning Rd, Shanghai 200050, Peoples R China |
| 学科主题 | Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; Physics, Applied |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2011-12-17 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/38542]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Xiao, F,Che, LF,Fan, KB,et al. A new symmetrical beam-mass structure for accelerometers by anisotropic etching without convex corner compensation[J]. 2008 3RD IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3,2008:1059-1062. |
| APA | Xiao, F,Che, LF,Fan, KB,Xiong, B,&Wang, YL.(2008).A new symmetrical beam-mass structure for accelerometers by anisotropic etching without convex corner compensation.2008 3RD IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3,1059-1062. |
| MLA | Xiao, F,et al."A new symmetrical beam-mass structure for accelerometers by anisotropic etching without convex corner compensation".2008 3RD IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3 (2008):1059-1062. |
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