Optical MEMS devices based on micromachined torsion structure - art. no. 683606
文献类型：期刊论文
| 作者 | Wu, YM ; Xu, J ; Li, SH ; Wan, ZJ ; Mu, CJ |
| 刊名 | MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS III
 |
| 出版日期 | 2008 |
| 卷号 | 6836页码:83606-83606 |
| 关键词 | ATTENUATOR |
| ISSN号 | 0277-786X |
| 通讯作者 | Wu, YM, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, 865 Changning Rd,Changning Dist, Shanghai 200050, Peoples R China |
| 学科主题 | Optics |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2011-12-17 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/38572]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Wu, YM,Xu, J,Li, SH,et al. Optical MEMS devices based on micromachined torsion structure - art. no. 683606[J]. MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS III,2008,6836:83606-83606. |
| APA | Wu, YM,Xu, J,Li, SH,Wan, ZJ,&Mu, CJ.(2008).Optical MEMS devices based on micromachined torsion structure - art. no. 683606.MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS III,6836,83606-83606. |
| MLA | Wu, YM,et al."Optical MEMS devices based on micromachined torsion structure - art. no. 683606".MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS III 6836(2008):83606-83606. |
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