Optical fiber accelerometer based on MEMS torsional micromirror - art. no. 68360Q
文献类型:期刊论文
作者 | Zeng, FL ; Zhong, SL ; Xu, J ; Wu, YM |
刊名 | MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS III |
出版日期 | 2008 |
卷号 | 6836页码:Q8360-Q8360 |
ISSN号 | 0277-786X |
关键词 | SENSORS |
通讯作者 | Zeng, FL, Chinese Acad Sci, Shanghai Inst Microsyst & Informat technol, State Key Lab Transducer Technol, Natl Key Lab Microsyst Technol, Shanghai 200050, Peoples R China |
学科主题 | Optics |
收录类别 | SCI |
语种 | 英语 |
公开日期 | 2011-12-17 |
源URL | [http://ir.sim.ac.cn/handle/331004/38577] |
专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
推荐引用方式 GB/T 7714 | Zeng, FL,Zhong, SL,Xu, J,et al. Optical fiber accelerometer based on MEMS torsional micromirror - art. no. 68360Q[J]. MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS III,2008,6836:Q8360-Q8360. |
APA | Zeng, FL,Zhong, SL,Xu, J,&Wu, YM.(2008).Optical fiber accelerometer based on MEMS torsional micromirror - art. no. 68360Q.MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS III,6836,Q8360-Q8360. |
MLA | Zeng, FL,et al."Optical fiber accelerometer based on MEMS torsional micromirror - art. no. 68360Q".MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS III 6836(2008):Q8360-Q8360. |
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