A novel hinged micromachined high-g piezoresistive accelerometer - art. no. 642306
文献类型：期刊论文
| 作者 | Fan,KB ; Xiong,B ; Che,LF ; Wang,YL |
| 刊名 | INTERNATIONAL CONFERENCE ON SMART MATERIALS AND NANOTECHNOLOGY IN ENGINEERING, PTS 1-3
 |
| 出版日期 | 2007 |
| 卷号 | 6423页码:42306-42306 |
| 关键词 | FABRICATION SENSORS |
| ISSN号 | 0277-786X |
| 通讯作者 | Fan, KB, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, 865 Changning Rd, Shanghai 200050, Peoples R China |
| 学科主题 | Optics |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2011-12-17 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/38584]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Fan,KB,Xiong,B,Che,LF,et al. A novel hinged micromachined high-g piezoresistive accelerometer - art. no. 642306[J]. INTERNATIONAL CONFERENCE ON SMART MATERIALS AND NANOTECHNOLOGY IN ENGINEERING, PTS 1-3,2007,6423:42306-42306. |
| APA | Fan,KB,Xiong,B,Che,LF,&Wang,YL.(2007).A novel hinged micromachined high-g piezoresistive accelerometer - art. no. 642306.INTERNATIONAL CONFERENCE ON SMART MATERIALS AND NANOTECHNOLOGY IN ENGINEERING, PTS 1-3,6423,42306-42306. |
| MLA | Fan,KB,et al."A novel hinged micromachined high-g piezoresistive accelerometer - art. no. 642306".INTERNATIONAL CONFERENCE ON SMART MATERIALS AND NANOTECHNOLOGY IN ENGINEERING, PTS 1-3 6423(2007):42306-42306. |
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