High-Q solenoid inductors with a CMOS-compatible concave-suspending MEMS process
文献类型：期刊论文
| 作者 | Gu, L ; Li, XX |
| 刊名 | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
 |
| 出版日期 | 2007 |
| 卷号 | 16期号:5页码:1162-1172 |
| 关键词 | HIGH-PERFORMANCE INDUCTORS SILICON RF ICS SPIRAL INDUCTORS MONOLITHIC INDUCTORS DESIGN TRANSFORMERS SUBSTRATE KOH |
| ISSN号 | 1057-7157 |
| 通讯作者 | Gu, L, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China |
| 学科主题 | Engineering, Electrical & Electronic; Engineering, Mechanical |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2011-12-17 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/38637]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Gu, L,Li, XX. High-Q solenoid inductors with a CMOS-compatible concave-suspending MEMS process[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,2007,16(5):1162-1172. |
| APA | Gu, L,&Li, XX.(2007).High-Q solenoid inductors with a CMOS-compatible concave-suspending MEMS process.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,16(5),1162-1172. |
| MLA | Gu, L,et al."High-Q solenoid inductors with a CMOS-compatible concave-suspending MEMS process".JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 16.5(2007):1162-1172. |
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