Macropore formation without illumination on low doped n-type silicon
文献类型:期刊论文
| 作者 | Bao, XQ ; Jiao, JW ; Wang, YL ; Na, KW ; Choi, H |
| 刊名 | JOURNAL OF THE ELECTROCHEMICAL SOCIETY
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| 出版日期 | 2007 |
| 卷号 | 154期号:3页码:D175-D181 |
| 关键词 | P-TYPE SILICON POROUS SILICON FORMATION MECHANISM ANODIC-DISSOLUTION STABILITY ANALYSIS SI MORPHOLOGY PHYSICS |
| ISSN号 | 0013-4651 |
| 通讯作者 | Bao, XQ, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Shanghai, Peoples R China |
| 学科主题 | Electrochemistry; Materials Science, Coatings & Films |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2011-12-17 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/38669] ![]() |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Bao, XQ,Jiao, JW,Wang, YL,et al. Macropore formation without illumination on low doped n-type silicon[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY,2007,154(3):D175-D181. |
| APA | Bao, XQ,Jiao, JW,Wang, YL,Na, KW,&Choi, H.(2007).Macropore formation without illumination on low doped n-type silicon.JOURNAL OF THE ELECTROCHEMICAL SOCIETY,154(3),D175-D181. |
| MLA | Bao, XQ,et al."Macropore formation without illumination on low doped n-type silicon".JOURNAL OF THE ELECTROCHEMICAL SOCIETY 154.3(2007):D175-D181. |
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