A microgyroscope with piezoresistance for both high-performance coriolis-effect detection and seesaw-like vibration control
文献类型：期刊论文
| 作者 | Li,XX ; Chen,XM ; Song,ZH ; Dong,PT ; Wang,YL ; Jiao,JW ; Yang,H |
| 刊名 | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
 |
| 出版日期 | 2006 |
| 卷号 | 15期号:6页码:1698-1707 |
| 关键词 | GYROSCOPE SILICON |
| ISSN号 | 1057-7157 |
| 通讯作者 | Li, XX, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China |
| 学科主题 | Engineering, Electrical & Electronic; Engineering, Mechanical |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2011-12-17 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/38675]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Li,XX,Chen,XM,Song,ZH,et al. A microgyroscope with piezoresistance for both high-performance coriolis-effect detection and seesaw-like vibration control[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,2006,15(6):1698-1707. |
| APA | Li,XX.,Chen,XM.,Song,ZH.,Dong,PT.,Wang,YL.,...&Yang,H.(2006).A microgyroscope with piezoresistance for both high-performance coriolis-effect detection and seesaw-like vibration control.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,15(6),1698-1707. |
| MLA | Li,XX,et al."A microgyroscope with piezoresistance for both high-performance coriolis-effect detection and seesaw-like vibration control".JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 15.6(2006):1698-1707. |
入库方式： OAI收割
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