中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
A single-sided micromachined piezoresistive SiO2 cantilever sensor for ultra-sensitive detection of gaseous chemicals

文献类型:期刊论文

作者Li, P ; Li, XX
刊名JOURNAL OF MICROMECHANICS AND MICROENGINEERING
出版日期2006
卷号16期号:12页码:2539-2546
关键词ATOMIC-FORCE MICROSCOPE MICROCANTILEVER SENSORS INDUCED DEFLECTIONS SURFACE STRESS FABRICATION PROBE
ISSN号0960-1317
通讯作者Li, XX, Shanghai Jiao Tong Univ, Res Inst Micro Nano Sci & Technol, Shanghai 200030, Peoples R China
学科主题Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics
收录类别SCI
语种英语
公开日期2011-12-17
源URL[http://ir.sim.ac.cn/handle/331004/38683]  
专题上海微系统与信息技术研究所_微系统技术_期刊论文
推荐引用方式
GB/T 7714
Li, P,Li, XX. A single-sided micromachined piezoresistive SiO2 cantilever sensor for ultra-sensitive detection of gaseous chemicals[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2006,16(12):2539-2546.
APA Li, P,&Li, XX.(2006).A single-sided micromachined piezoresistive SiO2 cantilever sensor for ultra-sensitive detection of gaseous chemicals.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,16(12),2539-2546.
MLA Li, P,et al."A single-sided micromachined piezoresistive SiO2 cantilever sensor for ultra-sensitive detection of gaseous chemicals".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 16.12(2006):2539-2546.

入库方式: OAI收割

来源:上海微系统与信息技术研究所

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