A single-sided micromachined piezoresistive SiO2 cantilever sensor for ultra-sensitive detection of gaseous chemicals
文献类型：期刊论文
| 作者 | Li, P ; Li, XX |
| 刊名 | JOURNAL OF MICROMECHANICS AND MICROENGINEERING
 |
| 出版日期 | 2006 |
| 卷号 | 16期号:12页码:2539-2546 |
| 关键词 | ATOMIC-FORCE MICROSCOPE MICROCANTILEVER SENSORS INDUCED DEFLECTIONS SURFACE STRESS FABRICATION PROBE |
| ISSN号 | 0960-1317 |
| 通讯作者 | Li, XX, Shanghai Jiao Tong Univ, Res Inst Micro Nano Sci & Technol, Shanghai 200030, Peoples R China |
| 学科主题 | Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2011-12-17 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/38683]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Li, P,Li, XX. A single-sided micromachined piezoresistive SiO2 cantilever sensor for ultra-sensitive detection of gaseous chemicals[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2006,16(12):2539-2546. |
| APA | Li, P,&Li, XX.(2006).A single-sided micromachined piezoresistive SiO2 cantilever sensor for ultra-sensitive detection of gaseous chemicals.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,16(12),2539-2546. |
| MLA | Li, P,et al."A single-sided micromachined piezoresistive SiO2 cantilever sensor for ultra-sensitive detection of gaseous chemicals".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 16.12(2006):2539-2546. |
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