Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young's modulus
文献类型：期刊论文
| 作者 | Li, XX ; Ono, T ; Wang, YL ; Esashi, M |
| 刊名 | APPLIED PHYSICS LETTERS
 |
| 出版日期 | 2003 |
| 卷号 | 83期号:15页码:3081-3083 |
| 关键词 | SENSITIVITY OSCILLATORS |
| ISSN号 | 0003-6951 |
| 通讯作者 | Li, XX, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, 865 Changning Rd, Shanghai 200050, Peoples R China |
| 学科主题 | Physics, Applied |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2011-12-17 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/38749]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Li, XX,Ono, T,Wang, YL,et al. Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young's modulus[J]. APPLIED PHYSICS LETTERS,2003,83(15):3081-3083. |
| APA | Li, XX,Ono, T,Wang, YL,&Esashi, M.(2003).Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young's modulus.APPLIED PHYSICS LETTERS,83(15),3081-3083. |
| MLA | Li, XX,et al."Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young's modulus".APPLIED PHYSICS LETTERS 83.15(2003):3081-3083. |
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