A novel x-axis tuning fork gyroscope with "8 vertical springs-proofmass" structure on (111) silicon
文献类型：期刊论文
| 作者 | Duan, F ; Jiao, JW ; Wang, YC ; Zhang, Y ; Mi, BW ; Li, JP ; Wang, YL |
| 刊名 | MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
 |
| 出版日期 | 2008 |
| 卷号 | 14期号:7页码:1009-1013 |
| 关键词 | SBM PROCESS SILICON |
| ISSN号 | 0946-7076 |
| 通讯作者 | Jiao, JW, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China |
| 学科主题 | Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; Physics, Applied |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2011-12-17 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/38818]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Duan, F,Jiao, JW,Wang, YC,et al. A novel x-axis tuning fork gyroscope with "8 vertical springs-proofmass" structure on (111) silicon[J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2008,14(7):1009-1013. |
| APA | Duan, F.,Jiao, JW.,Wang, YC.,Zhang, Y.,Mi, BW.,...&Wang, YL.(2008).A novel x-axis tuning fork gyroscope with "8 vertical springs-proofmass" structure on (111) silicon.MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,14(7),1009-1013. |
| MLA | Duan, F,et al."A novel x-axis tuning fork gyroscope with "8 vertical springs-proofmass" structure on (111) silicon".MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 14.7(2008):1009-1013. |
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