Concave-suspended high-Q solenoid inductors with a post-CMOS mems process in standard silicon wafers
文献类型：期刊论文
| 作者 | Gu, L ; Li, XX |
| 刊名 | PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2
 |
| 出版日期 | 2007 |
| 页码 | 160-163 |
| 关键词 | SPIRAL INDUCTORS |
| ISSN号 | 1084-6999 |
| 通讯作者 | Gu, L, Chinese Acad Sci, State Key Lab Transducer Technol, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China |
| 学科主题 | Engineering, Electrical & Electronic; Nanoscience & Nanotechnology |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2011-12-17 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/38821]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Gu, L,Li, XX. Concave-suspended high-Q solenoid inductors with a post-CMOS mems process in standard silicon wafers[J]. PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2,2007:160-163. |
| APA | Gu, L,&Li, XX.(2007).Concave-suspended high-Q solenoid inductors with a post-CMOS mems process in standard silicon wafers.PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2,160-163. |
| MLA | Gu, L,et al."Concave-suspended high-Q solenoid inductors with a post-CMOS mems process in standard silicon wafers".PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2 (2007):160-163. |
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