Single-water-processed trench-sidewall integration and its application in a micro resonant detector for vacuum monitoring
文献类型：期刊论文
| 作者 | Li, XX ; Xu, W ; Chen, Y ; Luo, L ; Gu, L ; Liu, M ; Cheng, BL ; Wang, YL |
| 刊名 | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
 |
| 出版日期 | 2006 |
| 卷号 | 24期号:1页码:16-19 |
| 关键词 | SILICON ACCELEROMETER |
| ISSN号 | 1071-1023 |
| 通讯作者 | Li, XX, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China |
| 学科主题 | Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Physics, Applied |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2011-12-17 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/38865]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Li, XX,Xu, W,Chen, Y,et al. Single-water-processed trench-sidewall integration and its application in a micro resonant detector for vacuum monitoring[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,2006,24(1):16-19. |
| APA | Li, XX.,Xu, W.,Chen, Y.,Luo, L.,Gu, L.,...&Wang, YL.(2006).Single-water-processed trench-sidewall integration and its application in a micro resonant detector for vacuum monitoring.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,24(1),16-19. |
| MLA | Li, XX,et al."Single-water-processed trench-sidewall integration and its application in a micro resonant detector for vacuum monitoring".JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 24.1(2006):16-19. |
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