Concave-suspended high-Q solenoid inductors with an RFIC-compatible bulk-micromachining technology
文献类型：期刊论文
| 作者 | Gu, L ; Li, XX |
| 刊名 | IEEE TRANSACTIONS ON ELECTRON DEVICES
 |
| 出版日期 | 2007 |
| 卷号 | 54期号:4页码:882-885 |
| 关键词 | HIGH-PERFORMANCE INDUCTORS SPIRAL INDUCTORS CMOS PROCESS SILICON FABRICATION SUBSTRATE DESIGN COPPER |
| ISSN号 | 0018-9383 |
| 通讯作者 | Gu, L, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China |
| 学科主题 | Engineering, Electrical & Electronic; Physics, Applied |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2012-02-01 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/60832]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Gu, L,Li, XX. Concave-suspended high-Q solenoid inductors with an RFIC-compatible bulk-micromachining technology[J]. IEEE TRANSACTIONS ON ELECTRON DEVICES,2007,54(4):882-885. |
| APA | Gu, L,&Li, XX.(2007).Concave-suspended high-Q solenoid inductors with an RFIC-compatible bulk-micromachining technology.IEEE TRANSACTIONS ON ELECTRON DEVICES,54(4),882-885. |
| MLA | Gu, L,et al."Concave-suspended high-Q solenoid inductors with an RFIC-compatible bulk-micromachining technology".IEEE TRANSACTIONS ON ELECTRON DEVICES 54.4(2007):882-885. |
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