Tens femtogram resoluble piezoresistive cantilever sensors with optimized high-mode resonance excitation
文献类型：期刊论文
| 作者 | Jin, DZ ; Liu, H ; Li, XX ; Liu, M ; Zuo, GM ; Wang, YL ; Yu, HT ; Ge, XH |
| 刊名 | 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Vols 1-3
 |
| 出版日期 | 2006 |
| 页码 | 832-836 |
| 关键词 | FREQUENCY STABILITY MICROCANTILEVERS TRANSDUCERS SYSTEMS |
| 通讯作者 | Li, XX, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Transducer Technol, Beijing 100864, Peoples R China |
| 学科主题 | Engineering, Electrical & Electronic; Nanoscience & Nanotechnology |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2011-12-17 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/38616]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Jin, DZ,Liu, H,Li, XX,et al. Tens femtogram resoluble piezoresistive cantilever sensors with optimized high-mode resonance excitation[J]. 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Vols 1-3,2006:832-836. |
| APA | Jin, DZ.,Liu, H.,Li, XX.,Liu, M.,Zuo, GM.,...&Ge, XH.(2006).Tens femtogram resoluble piezoresistive cantilever sensors with optimized high-mode resonance excitation.2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Vols 1-3,832-836. |
| MLA | Jin, DZ,et al."Tens femtogram resoluble piezoresistive cantilever sensors with optimized high-mode resonance excitation".2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Vols 1-3 (2006):832-836. |
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