Experimental study on resonant response of piezoresistive double-clamped (111)-Si nano-beam
文献类型：期刊论文
| 作者 | Zhao, QB ; Jiao, JW ; Yang, H ; Duan, F ; Lin, ZX ; Li, T ; Zhang, Y ; Wang, YL |
| 刊名 | 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Vols 1-3
 |
| 出版日期 | 2007 |
| 页码 | 560-563 |
| 关键词 | ATOMIC-FORCE MICROSCOPE FABRICATION CANTILEVERS TECHNOLOGY THICK |
| 通讯作者 | Zhao, QB, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China |
| 学科主题 | Engineering, Electrical & Electronic; Nanoscience & Nanotechnology |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2011-12-17 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/38627]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Zhao, QB,Jiao, JW,Yang, H,et al. Experimental study on resonant response of piezoresistive double-clamped (111)-Si nano-beam[J]. 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Vols 1-3,2007:560-563. |
| APA | Zhao, QB.,Jiao, JW.,Yang, H.,Duan, F.,Lin, ZX.,...&Wang, YL.(2007).Experimental study on resonant response of piezoresistive double-clamped (111)-Si nano-beam.2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Vols 1-3,560-563. |
| MLA | Zhao, QB,et al."Experimental study on resonant response of piezoresistive double-clamped (111)-Si nano-beam".2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Vols 1-3 (2007):560-563. |
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