Silicon dioxide microcantilever with piezoresistive element integrated for portable ultraresoluble gaseous detection
文献类型：期刊论文
| 作者 | Li, P ; Li, XX ; Zuo, GM ; Liu, J ; Wang, YL ; Liu, M ; Jin, DZ |
| 刊名 | APPLIED PHYSICS LETTERS
 |
| 出版日期 | 2006 |
| 卷号 | 89期号:7页码:74104-74104 |
| 关键词 | ATOMIC-FORCE MICROSCOPY SURFACE STRESS EXPLOSIVES |
| ISSN号 | 0003-6951 |
| 通讯作者 | Li, XX, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China |
| 学科主题 | Physics, Applied |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2011-12-17 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/38692]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Li, P,Li, XX,Zuo, GM,et al. Silicon dioxide microcantilever with piezoresistive element integrated for portable ultraresoluble gaseous detection[J]. APPLIED PHYSICS LETTERS,2006,89(7):74104-74104. |
| APA | Li, P.,Li, XX.,Zuo, GM.,Liu, J.,Wang, YL.,...&Jin, DZ.(2006).Silicon dioxide microcantilever with piezoresistive element integrated for portable ultraresoluble gaseous detection.APPLIED PHYSICS LETTERS,89(7),74104-74104. |
| MLA | Li, P,et al."Silicon dioxide microcantilever with piezoresistive element integrated for portable ultraresoluble gaseous detection".APPLIED PHYSICS LETTERS 89.7(2006):74104-74104. |
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