Silicon micromachined high-shock accelerometers with a curved-surface-application structure for over-range stop protection and free-mode-resonance depression
文献类型：期刊论文
| 作者 | Dong, J ; Li, XX ; Wang, YL ; Lu, DR ; Ahat, S |
| 刊名 | JOURNAL OF MICROMECHANICS AND MICROENGINEERING
 |
| 出版日期 | 2002 |
| 卷号 | 12期号:6页码:742-746 |
| ISSN号 | 0960-1317 |
| 通讯作者 | Li, XX, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, 865 Changning Rd, Shanghai 200050, Peoples R China |
| 学科主题 | Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2011-12-17 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/38758]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Dong, J,Li, XX,Wang, YL,et al. Silicon micromachined high-shock accelerometers with a curved-surface-application structure for over-range stop protection and free-mode-resonance depression[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2002,12(6):742-746. |
| APA | Dong, J,Li, XX,Wang, YL,Lu, DR,&Ahat, S.(2002).Silicon micromachined high-shock accelerometers with a curved-surface-application structure for over-range stop protection and free-mode-resonance depression.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,12(6),742-746. |
| MLA | Dong, J,et al."Silicon micromachined high-shock accelerometers with a curved-surface-application structure for over-range stop protection and free-mode-resonance depression".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 12.6(2002):742-746. |
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