Stability of Mechanical Properties for Submicrometer Single-Crystal Silicon Cantilever Under Cyclic Load
文献类型：期刊论文
| 作者 | Zhu, YF ; Zhang, FX ; Yang, JL ; Zheng, HY ; Yang, FH |
| 刊名 | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
 |
| 出版日期 | 2011 |
| 卷号 | 20期号:1页码:178-183 |
| 关键词 | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC |
| ISSN号 | 1057-7157 |
| 学科主题 | Engineering, Electrical & Electronic; Engineering, Mechanical |
| 语种 | 英语 |
| 公开日期 | 2012-04-12 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/106878]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Zhu, YF,Zhang, FX,Yang, JL,et al. Stability of Mechanical Properties for Submicrometer Single-Crystal Silicon Cantilever Under Cyclic Load[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,2011,20(1):178-183. |
| APA | Zhu, YF,Zhang, FX,Yang, JL,Zheng, HY,&Yang, FH.(2011).Stability of Mechanical Properties for Submicrometer Single-Crystal Silicon Cantilever Under Cyclic Load.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,20(1),178-183. |
| MLA | Zhu, YF,et al."Stability of Mechanical Properties for Submicrometer Single-Crystal Silicon Cantilever Under Cyclic Load".JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 20.1(2011):178-183. |
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