Design, fabrication and characterization of a high fill-factor micromirror array for wavelength selective switch applications
文献类型：期刊论文
| 作者 | Li, SH（李四华） ; Xua, J ; Zhong, SL（钟少龙） ; Wu, YM（吴亚明） |
| 刊名 | SENSORS AND ACTUATORS A-PHYSICAL
 |
| 出版日期 | 2011 |
| 卷号 | 171期号:2页码:274-282 |
| 关键词 | ELSEVIER SCIENCE SA |
| ISSN号 | 0924-4247 |
| 学科主题 | Engineering, Electrical & Electronic; Instruments & Instrumentation |
| 语种 | 英语 |
| 公开日期 | 2012-04-12 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/106890]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Li, SH,Xua, J,Zhong, SL,et al. Design, fabrication and characterization of a high fill-factor micromirror array for wavelength selective switch applications[J]. SENSORS AND ACTUATORS A-PHYSICAL,2011,171(2):274-282. |
| APA | Li, SH,Xua, J,Zhong, SL,&Wu, YM.(2011).Design, fabrication and characterization of a high fill-factor micromirror array for wavelength selective switch applications.SENSORS AND ACTUATORS A-PHYSICAL,171(2),274-282. |
| MLA | Li, SH,et al."Design, fabrication and characterization of a high fill-factor micromirror array for wavelength selective switch applications".SENSORS AND ACTUATORS A-PHYSICAL 171.2(2011):274-282. |
入库方式： OAI收割
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。