An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions
文献类型：期刊论文
| 作者 | Liu, YF ; Xie, J ; Zhang, ML ; Yang, JL ; Yang, FH |
| 刊名 | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
 |
| 出版日期 | 2011 |
| 卷号 | 20期号:2页码:470-475 |
| 关键词 | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC |
| ISSN号 | 1057-7157 |
| 学科主题 | Engineering, Electrical & Electronic; Engineering, Mechanical |
| 语种 | 英语 |
| 公开日期 | 2012-04-12 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/106896]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Liu, YF,Xie, J,Zhang, ML,et al. An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,2011,20(2):470-475. |
| APA | Liu, YF,Xie, J,Zhang, ML,Yang, JL,&Yang, FH.(2011).An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,20(2),470-475. |
| MLA | Liu, YF,et al."An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions".JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 20.2(2011):470-475. |
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