Improved micromachining of all SU-8 3D structures for a biologically-inspired flying robot
文献类型：期刊论文
| 作者 | Bao, XQ（包晓晴） ; Dargent, T ; Grondel, S ; Paquet, JB ; Cattan, E |
| 刊名 | MICROELECTRONIC ENGINEERING
 |
| 出版日期 | 2011 |
| 卷号 | 88期号:8页码:2218-2224 |
| 关键词 | ELSEVIER SCIENCE BV |
| ISSN号 | 0167-9317 |
| 学科主题 | Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Optics; Physics, Applied |
| 语种 | 英语 |
| 公开日期 | 2012-04-12 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/106913]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Bao, XQ,Dargent, T,Grondel, S,et al. Improved micromachining of all SU-8 3D structures for a biologically-inspired flying robot[J]. MICROELECTRONIC ENGINEERING,2011,88(8):2218-2224. |
| APA | Bao, XQ,Dargent, T,Grondel, S,Paquet, JB,&Cattan, E.(2011).Improved micromachining of all SU-8 3D structures for a biologically-inspired flying robot.MICROELECTRONIC ENGINEERING,88(8),2218-2224. |
| MLA | Bao, XQ,et al."Improved micromachining of all SU-8 3D structures for a biologically-inspired flying robot".MICROELECTRONIC ENGINEERING 88.8(2011):2218-2224. |
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