Analysis of Fringe Effect of MEMS Comb Capacitor with Slot Structures
文献类型：期刊论文
| 作者 | Dong, LX ; Huo, WH ; Yan, HX ; Sun, LL |
| 刊名 | INTEGRATED FERROELECTRICS
 |
| 出版日期 | 2011 |
| 卷号 | 129页码:122-132 |
| 关键词 | TAYLOR & FRANCIS LTD |
| ISSN号 | 1058-4587 |
| 学科主题 | Engineering, Electrical & Electronic; Physics, Applied; Physics, Condensed Matter |
| 语种 | 英语 |
| 公开日期 | 2012-04-12 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/106915]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Dong, LX,Huo, WH,Yan, HX,et al. Analysis of Fringe Effect of MEMS Comb Capacitor with Slot Structures[J]. INTEGRATED FERROELECTRICS,2011,129:122-132. |
| APA | Dong, LX,Huo, WH,Yan, HX,&Sun, LL.(2011).Analysis of Fringe Effect of MEMS Comb Capacitor with Slot Structures.INTEGRATED FERROELECTRICS,129,122-132. |
| MLA | Dong, LX,et al."Analysis of Fringe Effect of MEMS Comb Capacitor with Slot Structures".INTEGRATED FERROELECTRICS 129(2011):122-132. |
入库方式： OAI收割
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。