A SHIELDED CANTILEVER-TIP MICROWAVE PROBE FOR MICRO/NANO SURFACE IMAGING OF CONDUCTIVE PROPERTIES
文献类型：期刊论文
| 作者 | Yang,YL ; Lai,KJ ; Tang,QC ; Kundhikanjana,W ; Kelly,M ; Shen,ZX ; Li,XX |
| 刊名 | 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)
 |
| 出版日期 | 2011 |
| 期号 | 0页码:79-82 |
| 关键词 | IEEE |
| ISSN号 | 1084-6999 |
| 学科主题 | Engineering ; Electrical & Electronic; Nanoscience & Nanotechnology |
| 公开日期 | 2012-04-12 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/106919]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Yang,YL,Lai,KJ,Tang,QC,et al. A SHIELDED CANTILEVER-TIP MICROWAVE PROBE FOR MICRO/NANO SURFACE IMAGING OF CONDUCTIVE PROPERTIES[J]. 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS),2011(0):79-82. |
| APA | Yang,YL.,Lai,KJ.,Tang,QC.,Kundhikanjana,W.,Kelly,M.,...&Li,XX.(2011).A SHIELDED CANTILEVER-TIP MICROWAVE PROBE FOR MICRO/NANO SURFACE IMAGING OF CONDUCTIVE PROPERTIES.2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)(0),79-82. |
| MLA | Yang,YL,et al."A SHIELDED CANTILEVER-TIP MICROWAVE PROBE FOR MICRO/NANO SURFACE IMAGING OF CONDUCTIVE PROPERTIES".2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) .0(2011):79-82. |
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