A general throughput model for parallel cluster tools
文献类型：会议论文
| 作者 | Zheng XH(郑秀红); Yu HB(于海斌) ; Hu JT(胡静涛)
|
| 出版日期 | 2011 |
| 会议名称 | 2011 International Conference on Informatics, Cybernetics, and Computer Engineering |
| 会议日期 | November 19-20, 2011 |
| 会议地点 | Melbourne, Australia |
| 关键词 | Intelligent robots Manufacture Models Semiconductor device manufacture Throughput |
| 页码 | 215-222 |
| 通讯作者 | 郑秀红 |
| 中文摘要 | To effectively evaluate and analyze performance of cluster tools in semiconductor manufacturing, the paper presents a throughput model for parallel cluster tools .For developping this model, the timing diagram is applied to describe the usage of the chamber and robot in parallel processing of cluster tools. Finally, the theoretical model which indicates the relationship between the number of chamber, processing time, transport time, and throughtput is deduced. This model can analyze and computer the wafer period and the batch period fast and accurately. |
| 收录类别 | EI ; CPCI（ISTP） |
| 产权排序 | 1 |
| 会议录 | Advances in Intelligent and Soft Computing
 |
| 会议录出版者 | Springer Verlag |
| 会议录出版地 | Heidelberg, Germany |
| 语种 | 英语 |
| ISSN号 | 1867-5662 |
| ISBN号 | 978-3-642-25184-9 |
| WOS记录号 | WOS:000301960900029 |
| 源URL | [http://ir.sia.cn/handle/173321/8299]  |
| 专题 | 沈阳自动化研究所_工业信息学研究室 |
| 推荐引用方式 GB/T 7714 | Zheng XH,Yu HB,Hu JT. A general throughput model for parallel cluster tools[C]. 见:2011 International Conference on Informatics, Cybernetics, and Computer Engineering. Melbourne, Australia. November 19-20, 2011. |
入库方式： OAI收割
来源：沈阳自动化研究所
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