The Research of the Stochastic Reward Net Model for the Cluster Tool in Serial-parallel Mode
文献类型：会议论文
| 作者 | Zheng XH(郑秀红); Hu JT(胡静涛) ; Yu HB(于海斌)
|
| 出版日期 | 2011 |
| 会议名称 | 2011 International Conference on Electric Information and Control Engineering |
| 会议日期 | April 15-17, 2011 |
| 会议地点 | Wuhan, China |
| 关键词 | The cluster tool serial-parallel stochastic reward net throughput model |
| 页码 | 5 pp. |
| 中文摘要 | The proliferation of cluster tools in semiconductor manufacturing motivates an understanding of how basic parameters determine the performance of cluster tools. This paper presents three general stochastic reward net models of serial-parallel cluster tools to describe the processing procedure of them. They help to effectively analyze and evaluate the performance of cluster tools on different demands. |
| 收录类别 | EI |
| 产权排序 | 1 |
| 会议录 | 2011 International Conference on Electric Information and Control Engineering
 |
| 会议录出版者 | IEEE |
| 会议录出版地 | Piscataway, NJ, USA |
| 语种 | 英语 |
| ISBN号 | 978-1-4244-8039-5 |
| 源URL | [http://ir.sia.cn/handle/173321/8424]  |
| 专题 | 沈阳自动化研究所_工业信息学研究室 |
| 推荐引用方式 GB/T 7714 | Zheng XH,Hu JT,Yu HB. The Research of the Stochastic Reward Net Model for the Cluster Tool in Serial-parallel Mode[C]. 见:2011 International Conference on Electric Information and Control Engineering. Wuhan, China. April 15-17, 2011. |
入库方式： OAI收割
来源：沈阳自动化研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。