中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Desing, Modeling, and Micromanipulation Experiments of A Novel 2-D Micro Force Sensor

文献类型:期刊论文

作者Liu YY(刘意杨); Wang YC(王越超); Yu P(于鹏); Dong ZL(董再励)
刊名International Journal of Information Acquisition
出版日期2010
卷号7期号:1页码:51-57
关键词Micromanipulation 2-D micro force sensor
ISSN号0219-8789
产权排序1
中文摘要Because of the micro/nano manipulation’s complexity, the accurate feedback information of the micro interactive force acting on micro devices is quite important and necessary for micro/nano manipulation, especially the 2-D micro interactive force feedback information. At present, there are no reliable and accurate 2-D micro force sensors applied in micro/nano manipulation. To solve the above problem, a novel 2-D micro force sensor that can reliably measure force in the range of submicro Newton (μN) is designed and developed in this paper. Based on the model of 1-D micro force sensor designed by us, the model of this 2-D sensor is set up. To verify the model of the 2-D sensor, micromanipulation experiments are designed and realized. Experiment results show the submicro Newton resolution, and verify the validity of the 2-D sensor’s model. The developed 2-D micro force sensor will contribute to promoting the complexity of micro/nano manipulation, and will facilitate to automate the micro/nano manipulation.
语种英语
公开日期2012-05-29
源URL[http://ir.sia.cn/handle/173321/7337]  
专题沈阳自动化研究所_机器人学研究室
推荐引用方式
GB/T 7714
Liu YY,Wang YC,Yu P,et al. Desing, Modeling, and Micromanipulation Experiments of A Novel 2-D Micro Force Sensor[J]. International Journal of Information Acquisition,2010,7(1):51-57.
APA Liu YY,Wang YC,Yu P,&Dong ZL.(2010).Desing, Modeling, and Micromanipulation Experiments of A Novel 2-D Micro Force Sensor.International Journal of Information Acquisition,7(1),51-57.
MLA Liu YY,et al."Desing, Modeling, and Micromanipulation Experiments of A Novel 2-D Micro Force Sensor".International Journal of Information Acquisition 7.1(2010):51-57.

入库方式: OAI收割

来源:沈阳自动化研究所

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