Desing, Modeling, and Micromanipulation Experiments of A Novel 2-D Micro Force Sensor
文献类型:期刊论文
作者 | Liu YY(刘意杨)![]() ![]() ![]() ![]() |
刊名 | International Journal of Information Acquisition
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出版日期 | 2010 |
卷号 | 7期号:1页码:51-57 |
关键词 | Micromanipulation 2-D micro force sensor |
ISSN号 | 0219-8789 |
产权排序 | 1 |
中文摘要 | Because of the micro/nano manipulation’s complexity, the accurate feedback information of the micro interactive force acting on micro devices is quite important and necessary for micro/nano manipulation, especially the 2-D micro interactive force feedback information. At present, there are no reliable and accurate 2-D micro force sensors applied in micro/nano manipulation. To solve the above problem, a novel 2-D micro force sensor that can reliably measure force in the range of submicro Newton (μN) is designed and developed in this paper. Based on the model of 1-D micro force sensor designed by us, the model of this 2-D sensor is set up. To verify the model of the 2-D sensor, micromanipulation experiments are designed and realized. Experiment results show the submicro Newton resolution, and verify the validity of the 2-D sensor’s model. The developed 2-D micro force sensor will contribute to promoting the complexity of micro/nano manipulation, and will facilitate to automate the micro/nano manipulation. |
语种 | 英语 |
公开日期 | 2012-05-29 |
源URL | [http://ir.sia.cn/handle/173321/7337] ![]() |
专题 | 沈阳自动化研究所_机器人学研究室 |
推荐引用方式 GB/T 7714 | Liu YY,Wang YC,Yu P,et al. Desing, Modeling, and Micromanipulation Experiments of A Novel 2-D Micro Force Sensor[J]. International Journal of Information Acquisition,2010,7(1):51-57. |
APA | Liu YY,Wang YC,Yu P,&Dong ZL.(2010).Desing, Modeling, and Micromanipulation Experiments of A Novel 2-D Micro Force Sensor.International Journal of Information Acquisition,7(1),51-57. |
MLA | Liu YY,et al."Desing, Modeling, and Micromanipulation Experiments of A Novel 2-D Micro Force Sensor".International Journal of Information Acquisition 7.1(2010):51-57. |
入库方式: OAI收割
来源:沈阳自动化研究所
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