Infinite Dimension Modeling of a Novel Micro Force Sensor and the Application in Micromanipulation
文献类型：期刊论文
| 作者 | Liu YY(刘意杨) ; Wang YC(王越超); Yu P(于鹏); Dong ZL(董再励)
|
| 刊名 | International Journal of Information Acquisition
 |
| 出版日期 | 2010 |
| 卷号 | 7期号:4页码:323-329 |
| 关键词 | Micromanipulation Micro force Sensor Infinite dimension |
| ISSN号 | 0219-8789 |
| 产权排序 | 1 |
| 中文摘要 | To accurately measure the micro interactive force (For example, adhesion, surface tension, friction, and assembly force) acting on micro devices during micro/nano manipulation, a novel micro force sensor that can reliably measure force in the range of sub-micro-Newton (μN) is designed and developed in this paper. During the application of this micro force sensor in micro/nano manipulation, the accuracy of this sensor’s model is quite important to the force control of the system. Therefore, the accurate infinite dimension model of the micro force sensor and micro manipulator is built up. Based on the infinite dimension model, the impedance control system is designed. To verify the infinite dimension model and the control system, micromanipulation experiments are designed and realized. Experiment results verify the accuracy of the infinite dimension model of the sensor, and show the efficiency of the impedance control system. The developed micro force sensor and the infinite dimension modeling provide a feasible and versatile solution in micro force sensing and feedback force control for micro/nano manipulation, and will promote the technology of automating the micro/nano manipulation. |
| 语种 | 英语 |
| 公开日期 | 2012-05-29 |
| 源URL | [http://ir.sia.cn/handle/173321/7365]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 推荐引用方式 GB/T 7714 | Liu YY,Wang YC,Yu P,et al. Infinite Dimension Modeling of a Novel Micro Force Sensor and the Application in Micromanipulation[J]. International Journal of Information Acquisition,2010,7(4):323-329. |
| APA | Liu YY,Wang YC,Yu P,&Dong ZL.(2010).Infinite Dimension Modeling of a Novel Micro Force Sensor and the Application in Micromanipulation.International Journal of Information Acquisition,7(4),323-329. |
| MLA | Liu YY,et al."Infinite Dimension Modeling of a Novel Micro Force Sensor and the Application in Micromanipulation".International Journal of Information Acquisition 7.4(2010):323-329. |
入库方式： OAI收割
来源：沈阳自动化研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。