Integrated SWCNT sensors in micro-wind tunnel for air-flow shear-stress measurement
文献类型：期刊论文
| 作者 | Winnie W. Y. Chow; Qu YL(曲艳丽) ; Li WJ(李文荣); Steve C. H. Tung
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| 刊名 | Microfluidics and Nanofluidics
 |
| 出版日期 | 2010 |
| 卷号 | 8期号:5页码:631-640 |
| 关键词 | Carbon nanotubes CNT sensors Micro-flow sensor Micro shear-stress sensor |
| ISSN号 | 1613-4982 |
| 产权排序 | 2 |
| 中文摘要 | We have developed SWCNT sensors for air-flow shear-stress measurement inside a polymethylmethacrylate (PMMA) “micro-wind tunnel” chip. An array of sensors is fabricated by using dielectrophoretic (DEP) technique to manipulate bundled single-walled carbon nanotubes (SWCNTs) across the gold microelectrodes on a PMMA substrate. The sensors are then integrated in a PMMA micro-wind tunnel, which is fabricated by SU-8 molding/hot-embossing technique. Since the sensors detect air flow by thermal transfer principle, we have first examined the I–V characteristics of the sensors and confirmed that self-heating effect occurs when the input voltage is above ~1 V. We then performed the flow sensing experiment on the sensors using constant temperature (CT) configuration with input power of ~230 μW. The voltage output of the sensors increases with the increasing flow rate in the micro-wind tunnel and the detectable volumetric flow is in the order of 1 × 10−5m3/s. We also found that the activation power of the sensors has a linear relation with 1/3 exponential power of the shear stress which is similar to conventional hot-wire and polysilicon types of convection-based shear-stress sensors. Moreover, measurements of sensors with different overheat ratios were compared, and results showed that sensor is more sensitive to the flow with a higher overheat ratio. |
| WOS标题词 | Science & Technology ; Technology ; Physical Sciences |
| 类目[WOS] | Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Physics, Fluids & Plasmas |
| 研究领域[WOS] | Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000276474300007 |
| 公开日期 | 2012-05-29 |
| 源URL | [http://ir.sia.cn/handle/173321/7368]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 推荐引用方式 GB/T 7714 | Winnie W. Y. Chow,Qu YL,Li WJ,et al. Integrated SWCNT sensors in micro-wind tunnel for air-flow shear-stress measurement[J]. Microfluidics and Nanofluidics,2010,8(5):631-640. |
| APA | Winnie W. Y. Chow,Qu YL,Li WJ,&Steve C. H. Tung.(2010).Integrated SWCNT sensors in micro-wind tunnel for air-flow shear-stress measurement.Microfluidics and Nanofluidics,8(5),631-640. |
| MLA | Winnie W. Y. Chow,et al."Integrated SWCNT sensors in micro-wind tunnel for air-flow shear-stress measurement".Microfluidics and Nanofluidics 8.5(2010):631-640. |
入库方式： OAI收割
来源：沈阳自动化研究所
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