Micro ICPF actuators for aqueous sensing and manipulation
文献类型：期刊论文
| 作者 | Zhou, Wenli; Li WJ(李文荣)
|
| 刊名 | Sensors and Actuators A: Physical
 |
| 出版日期 | 2004 |
| 卷号 | 114期号:2-3页码:406-412 |
| 关键词 | Polymer actuator Micro ICPF Underwater actuator |
| ISSN号 | 0924-4247 |
| 产权排序 | 1 |
| 通讯作者 | 李文荣 |
| 中文摘要 | This paper presents the results of our ongoing investigation of using Nafion solution to construct micron scale actuators as grippers to operate under aqueous environment. Thus far, we have demonstrated that MEMS-based fabrication of cantilever structures composed of Au/Nafion/Au tri-layers on silicon substrates is possible using Nafion solution. The smallest actuators fabricated were 30 [mu]m wide, 300 [mu]m long and 0.4 [mu]m thick. We have shown that two-finger actuators (each 100 [mu]m wide, 1200 [mu]m long and 0.4 [mu]m thick) can be fully actuated in water at ~7 V DC. In addition, with a special sacrificial release process, micro ICPF structures can be made to curl whenever they come in contact with water, and can be de-curled instantaneously when they are immersed in acid, suggesting that they can be used in sensing pH level changes. |
| WOS标题词 | Science & Technology ; Technology |
| 类目[WOS] | Engineering, Electrical & Electronic ; Instruments & Instrumentation |
| 研究领域[WOS] | Engineering ; Instruments & Instrumentation |
| 收录类别 | SCI ; EI ; CPCI（ISTP） |
| 语种 | 英语 |
| WOS记录号 | WOS:000223704800039 |
| 公开日期 | 2012-05-29 |
| 源URL | [http://ir.sia.cn/handle/173321/7375]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 推荐引用方式 GB/T 7714 | Zhou, Wenli,Li WJ. Micro ICPF actuators for aqueous sensing and manipulation[J]. Sensors and Actuators A: Physical,2004,114(2-3):406-412. |
| APA | Zhou, Wenli,&Li WJ.(2004).Micro ICPF actuators for aqueous sensing and manipulation.Sensors and Actuators A: Physical,114(2-3),406-412. |
| MLA | Zhou, Wenli,et al."Micro ICPF actuators for aqueous sensing and manipulation".Sensors and Actuators A: Physical 114.2-3(2004):406-412. |
入库方式： OAI收割
来源：沈阳自动化研究所
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